Direct Growth of Ge1−xSnx Films on Si Using a Cold-Wall Ultra-High Vacuum Chemical-Vapor-Deposition System
نویسندگان
چکیده
1 Microelectronics-Photonics Graduate Program (μEP), University of Arkansas, Fayetteville, AR, USA 2 Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA 3 Mechanical Engineering Department, University of Karbala, Karbala, Iraq 4 Arktonics, LLC, Fayetteville, AR, USA 5 Engineering-Physics Department, Southern Arkansas University, Magnolia, AR, USA 6 Department of Engineering, University of Massachusetts Boston, Boston, MA, USA
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